ELECTROMECHANICAL RECONDITIONING

NxEdge’s AceCo repairs, refurbishes, cleans and tests a variety of electro-mechanical and pneumatic equipment used in high vacuum CVD, MOCVD, PVD, ALD and FPD processes including those used in solar, flat panel display, OLED and semiconductor manufacture. Some examples of equipment we refurbish are:

  • High Vacuum Valves – Chamber isolation, load lock isolation, pendulum and pressure proportioning control valves. Models supported include: CKD, HVA, MKS, Norcal, SMC and VAT.
  • Heater Pedestals, Chucks and Susceptors
  • Photolithography Track Hot and Chill Plates
  • Ferrofluidic Seals and Feed-Through Assemblies
  • Actuators and Cylinders
  • CMP and DNS Track equipment
  • Wafer Handling Robots and Transfer Systems

At NxEdge, we understand the crucial roles Electromechanical and pneumatic equipment play in semiconductor manufacturing.

Electro-Mechanical Equipment:

    • Precision Stage Systems: Used for accurate positioning of wafers during various manufacturing processes.
    • Auto-Focus Systems: Essential for inspection and lithography tools to ensure precise focus on the wafer surface.
    • Actuators: Convert electrical energy into mechanical motion, providing precise control for various manufacturing steps.

Pneumatic Equipment:

    • Wafer Handling: Pneumatic systems are used for the safe and precise handling of wafers, reducing the risk of contamination and damage.
    • Vacuum Systems: Essential for creating the controlled environments required for many semiconductor processes, such as etching and deposition.

These systems ensure high precision, reliability, and efficiency in the complex processes involved in semiconductor manufacturing.